MEMS and Microsystems
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Lecture 1
Introduction to MEMS & Microsystems -
Lecture 2
Introduction to Microsensors -
Lecture 3
Evaluation of MEMS, Microsensors, Market Survey -
Lecture 4
Application of MEMS -
Lecture 5
MEMS Materials -
Lecture 6
MEMS Materials Properties (Part 1) -
Lecture 7
MEMS Materials Properties (Part 2) -
Lecture 8
Microelectronic Technology for MEMS -
Lecture 9
Microelectronic Technology for MEMS -
Lecture 10
Micromachining Technology for MEMS -
Lecture 11
Micromachining Process -
Lecture 12
Etch Stop Techniques and Microstructure -
Lecture 13
Surface and Quartz Micromachining -
Lecture 14
Fabrication of Micromachined Microstructure -
Lecture 15
Microstereolithography
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