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MEMS microvalve boasts precise flow rate control

Posted: 05 Jun 2015     Print Version  Bookmark and Share

Keywords:MEMS  microvalve  silicon servo valve  silQflo 

DunAn Microstaq (DMQ) rolled out the silQflo silicon servo valve, a 10.80mm x 4.83mm x 2.225mm MEMS device that controls fluid pressure or flow rates with precision at fast response time.

This is 36 per cent smaller than the company's established MEMS based device the PDA-3-10.

The silQflo is designed to control fluid pressure or flow rates with precision and fast response times. It has contamination tolerance rated to 20/19/16 as per the ISO 4406:1999 standard. The microvalve series has been proven on automotive transmission test to withstand up to 10,000 particles greater than 4µ in size, per ml of fluid.


Typical fluids for which it is suitable include hydraulic oils, refrigerants, gases N2, CO2, ultra-dry air and electrically non-conductive high boiling point liquids. It has a maximum operating pressure of 500psi and is rated for 8 million open-close cycles.

The unit is electro-thermally driven controlled by varying applied power to the actuator. The microvalve is configured as a 3-port proportional pressure control valve or it can also be configured as a 2-port proportional flow control valve.

"We are excited to introduce the latest generation of the silQflo microvalve," said Parthiban Arunasalam, CEO of DMQ, in a statement. "DMQ continues to push the envelope in size reduction of the overall footprint of the microvalve, while maintaining the required characteristics of a valve for macro flow applications."

DMQ plans to phase out its older MEMS device, the PDA-3-10, by the end of 2015, the company said.

The company was created in December 2011 when the privately owned Microstaq was acquired by Zhejiang Dun'an Artificial Environment (based in Hangzhou, China).

- Peter Clarke
  EE Times Europe

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