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Rolith demos Transparent Metal Grid Electrode

Posted: 20 Aug 2013     Print Version  Bookmark and Share

Keywords:Rolith  Transparent Metal Grid Electrode  rolling mask lithography  optical lithography 

Rolith Inc. has revealed what it says is the successful demonstration of Transparent Metal Grid Electrode technology based on its disruptive nanolithography method called rolling mask lithography (RML).

The company used its proprietary nanolithography technology called Rolling Mask Lithography (RML) for fabrication of transparent metal wire grid electrodes on large areas of substrate materials. RML is based on near-field continuous optical lithography, which is implemented using cylindrical phase masks.

Transparent metal electrodes on glass substrates were fabricated in the form of sub-micron width nanowires, lithographically placed in a regular 2D grid pattern with a period of tens of microns, and thickness of a few hundreds of nanometers. Such metal structure is evaluated as completely invisible to the human eye, highly transparent (>94 per cent transmission) with a very low haze (about two per cent), and low resistivity, indicated the firm. This set of parameters places Rolith technology above all major competition for ITO-alternative technologies, boasted the firm.

Gen-2 RML tool capable of patterning substrates up to 1m long and built earlier this year has been used to demonstrate this technology.

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