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Intel works out 3D NAND flash strategy

Posted: 28 May 2013     Print Version  Bookmark and Share

Keywords:NAND flash  memory ICs  HKMG 

Speaking at the Imec Technology Forum, Keyvan Esfarjani, technology & manufacturing VP at Intel and co-CEO of IM Flash Technologies (IMFT) revealed some of the thinking behind its 3D NAND strategy. IMFT, the joint venture between Intel and Micron Technologies, is considering how and when to take its NAND flash memory ICs into the third dimension but reckons its development of a 20nm memory cell has bought it a generation or two of 2D scaling.

An industry-wide transition for the nonvolatile NAND flash memory technology from memory cells in a 2D array to strings of NAND transistors integrated monolithically in the vertical direction is now anticipated. These 3D memories are expected to be arranged as a 2D array of vertical semiconductor channels with many levels of gate-all-around (GAA) structures forming the multiple voltage level memory cell transistors.

Toshiba is leading the charge towards 3D NAND processes with its p-BiCS (pipe-shaped Bit Cost Scalable) technology, which it has presented at numerous learned conferences over several years. Towards the end of last year Toshiba announced that it had 16-layer devices based on a 50-nm diameter vertical channel. Samples are due this year and volume production in 2015. Toshiba's p-BiC technology arranges the transistor string in a U-shape.

But Esfarjani, while acknowledging there is a scaling limit for 2D NAND flash, indicated in one of his slides that 2D NAND flash can scale to two more nodes at about 15 and 10nm. The slide showed that the first 3D NAND generation is likely to be brought up alongside that 15nm 2D node. Esfarjani added that 16 layer NAND flash ICs will not be enough to provide an economic benefit. "You need 64 or at least 32 layers," he said.

Esfarjani said that the planar floating-gate high-K metal gate cell introduced by IMFT at the 20nm node to replace a "wrap-around" cell used at 34 and 25nm would scale further. IMFT introduced a 128Gbit NAND flash memory at the 20nm during 2012 leveraging its HKMG experience gained in logic circuits.

Among the techniques being used to extend the 2D NAND flash generation are the addition of a nitride film and nanodots, said Esfarjani. "But a working cell is not enough. You also need high endurance of 10^5 cycles and higher," he told the Imec Technology Forum audience.

"The transition to 3-D is not limited by lithography," Esfarjani said indicating that a 40nm diameter semiconductor channel was about right. The challenges are in metrology, in finding materials that can withstand the temperatures of multi-layer semiconductor processing and the high aspect ratio etch to drive in the vertical channel. This has to be controlled at an angle of taper of precisely 89.8 degrees, Esfarjani said.

"The NAND market will be with us and growing for years to come. 2D NAND continues with the planar floating gate cell and 3-D NAND will carry us beyond the 10-nm limit," concluded Esfarjani.

During questions at the end of his talk Esfarjani was asked if he could share information about the materials that IMFT is using to create the dielectric and gates within the vertical channel. He confirmed that IMFT is working on new materials but said that some information is too good to share.

- Peter Clarke
  EE Times





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