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A*Star IME launches MEMS consortium phase II

Posted: 08 Jun 2012     Print Version  Bookmark and Share

Keywords:MEMS  oscillator  magnetometer  energy harvester  through-silicon-via 

A*STAR Institute of Microelectronics (IME) has announced micro-electro-mechanical-systems (MEMS) Consortium Phase II, to accelerate MEMS technology into markets driven by strong demand for next generation mobile devices.

The second phase of the MEMS Consortium will build on the work accomplished in Phase I to develop 3 product-oriented (PO) devices, namely the oscillator, magnetometer and energy harvester, which are among the fastest growing MEMS devices in the next five years.

Phase I has successfully established common MEMS technology platforms for Silicon-On-Insulator (SOI) MEMS, aluminium nitride radio frequency (AIN RF) MEMS and wafer-level packaging (WLP) with solder hermetic bonding.

Phase II will focus on establishing MEMS process modules and MEMS-CMOS integration methodologies for the chosen PO devices based on IME's through-silicon-via (TSV) technology.

With the devices as demonstration vehicles, Phase II also aims for developing a process design kit (PDK) for MEMS, "paving the way for standardisation and cost-effective MEMS solutions for high volume manufacturing."

The MEMS Consortium Phase II has attracted company members including AAC Technologies, Robert Bosch, Lite-on Technology, Marvell Technology, Murata Electronics, GlobalFoundries, Coventor, EV Group, SPTS, AMEC, Okmetic and Soitec.

"Coventor will be working with IME to create robust PDK libraries and embed these into our simulation tools and validating these PDK's with reference designs to support the MEMS Consortium Phase II to achieve its objectives," said Tom Flynn, VP—sales and dusiness development, Coventor.

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