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Foundry service for R&D launched

Posted: 04 Feb 2011     Print Version  Bookmark and Share

Keywords:R&D manufacturing services  PVD deposition  fab and testing capabilities  metrology 

Semiconductor Support Services Co. has launched an R&D manufacturing service aimed at working with discrete manufacturers, foundries, universities and fabless design houses.

The company, which supplies refurbished semiconductor manufacturing equipment, said the new service will cover fab and testing capabilities at its headquarters in Cedar Park, Texas, northwest of Austin. Its corporate offices comprise 464.52sq. metre (5,000sq.feet) of clean room, including a class 10 clean room with PVD deposition capability and metrology. They also house a demo lab that processes various standard and experimental metals on substrates up to 200mm.

"We have the metallisation portion of the fab. We can do that portion of the process for prototype or product," said Harry Engwer, executive director, in an e-mail newsletter. "We can also configure our systems to run 200mm, 150mm and piece parts. We cannot run the other processes (photolithography, implant, CMP, etch, etc.). We do however have the metrology equipment to measure the results."

The company is providing one step of the semiconductor manufacturing process. "We are able to deposit various physical vapour deposition metals via a variety of process technologies along with the associated metrology required to measure the results. We have assigned two Applied Materials Endura 5500s in our dedicated clean room with the ability to expand to four total," he said.

"We will be able to work with discrete manufacturers, foundries, universities and fabless design houses," he said. "The Enduras can be set up to run 200mm wafers and below, including single test structures on carriers. This offers a vehicle to test new technologies and metals to determine their impact on production or process capability. This can prevent costly delays in product development without impacting the end user's current operations. Basically, our customers will be able to develop and test the processes in parallel to the system refurbishment. Or in the case of universities, we can provide quality PVD films and technical knowledge without a large capital investment."

The company will continue to see used gear. "We primarily supply refurbished Applied Materials semiconductor manufacturing equipment. However, we also recognise the need to provide engineering capability, know-how and value-added services to our global customer base," he added.

Mark LaPedus
EE Times

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