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CEA-Leti welcomes ST to e-beam litho programme

Posted: 21 Jan 2010     Print Version  Bookmark and Share

Keywords:ST CEA-Leti programme  E-Beam  maskless lithography 

STMicroelectronics has joined CEA-Leti's three-year e-beam programme that covers a global approach to the technology, including tool assessment, patterning and process integration, data handling, prototyping and cost analysis.

The multiple e-beam lithography programme allows companies to assess a maskless lithography infrastructure for IC manufacturing and the use of Mapper Technology for high-throughput.

"STMicroelectronics has been working for more than a decade with CEA-Leti on maskless lithography. Together, ST and CEA-Leti have established a full shaped-beam capability on ST's Crolles pilot line and demonstrated the insertion of e-beam technology in a standard CMOS process flow," said Joël Hartmann, silicon-technology development director for ST at Crolles, France. "Joining the Imagine programme is a logical step for ST to get access to a maskless lithography possible solution for future technology nodes."

"The Imagine programme will benefit from the strong knowledge and support of STMicroelectronics in maskless technology," said Laurent Malier, CEO, Leti. "The experience of CEA-Leti in e-beam technology has been strengthened over the years by this partnership with ST for using e-beam for advanced technology demonstrators. With STMicroelectronics supporting the Imagine programme, we are convinced we will succeed to make maskless lithography a viable solution."

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