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ITRI's 3D consortium welcomes SUSS MicroTec

Posted: 01 Oct 2009     Print Version  Bookmark and Share

Keywords:3D consortium  300mm  lithography 

SUSS MicroTec is engaging with the Industrial Technology Research Institute (ITRI) in Hsin-Chu, Taiwan, on the development of 3D integration technologies. The company is joining the ITRI-led multinational research association known as the Advanced Stacked-System Technology and Application Consortium (Ad-STAC). The group will implement the 300mm lithography cluster LithoPack300 and the 300mm bond cluster CBC300 of SUSS MicroTec in its 300mm demo production line. With this, SUSS MicroTec is joining the consortium and will apply its 3D integration know-how to further process development.

The Ad-STAC aims to drive technology advances for industrial development in the field of 3D integration. It consists of 12 multinational companies installing the world's first 300mm demo-production line, targeted solely at 3D R&D. This line provides state-of-the-art equipment and materials for a wide range of processes. The facility which is open to all parties interested in 3D development, offers companies from different fields as well as research institutes a unique environment to develop and test new technologies and products.

The 300mm wafer processing equipment of SUSS MicroTec joining the demo production line represents the core solutions of the SUSS MicroTec 300mm portfolio. The LithoPack300 integrates two latest generation 300mm photolithography modules, the MA300 Gen2 mask aligner and the ACS300 Gen3 spray coater, in one system. The CBC300 is a modular wafer bonding platform configured to run the latest fusion bonding techniques with plasma activation, thermo compression bonding including copper-to-copper) bonds for 3D Integration. It offers temporary bonding capability using the latest generation adhesives specifically designed for the 3D applications.

"We are looking forward to SUSS MicroTec joining Ad-STAC," noted Ian Chan, VP and EOL general director of ITRI. "SUSS MicroTec is known as the leading expert in their field so I am confident that their experience will become a real asset to the challenging environment of our demo production line.

"We are proud to have become part of this important alliance in ITRI's Ad-STAC program," stated Frank Averdung, CEO and president of SUSS MicroTec. "We will be working with worldwide leading research and industry partners on viable production platforms to enable cost efficient and high yielding manufacturing processes. Being at the forefront of technology development we will be able to directly pass our technology advancements on to our customers to shorten the time to market for our customers' advanced products."

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