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Trio works on 42-nm flash memory optimisation

Posted: 26 Feb 2009     Print Version  Bookmark and Share

Keywords:Proteus ProGen  42nm flash  physical modelling  model accuracy 

Synopsys Inc. has teamed up with Powerchip and Nikon to deploy the Nikon Scanner Signature Files (NSSF) as a means to increase Proteus ProGen model accuracy on 42nm flash memory designs.

The NSSF parameters provide factory-averaged empirical data from the illumination source, lens and stage, which ports directly into Proteus ProGen models to capture the unique scanner signatures. Some or all of these parameters can be deployed to provide increased model accuracy for critical designs—like memory cells—with little to no impact on optical proximity correction (OPC) runtime. The migration from ideal to empirical scanner parameters enables enhanced physical modelling and progression to future technology nodes in which customised or aggressive off-axis illumination is common with memory processes.

This phase of NSSF deployment is the latest development in an ongoing collaboration between Synopsys and Nikon to develop the required model accuracy value links between OPC software and Nikon hardware.

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