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SRC, IMEC team up to explore new processes

Posted: 18 Feb 2009     Print Version  Bookmark and Share

Keywords:semiconductor manufacturing  minimising emissions  nano-structure cleaning processes  planarisation processes 

The Semiconductor Research Corp. (SRC) and IMEC have teamed up to devise novel processes and materials for semiconductor manufacturing.

The research will be conducted among IMEC and the joint SRC/Sematech Centre for Environmentally Benign Semiconductor Manufacturing (CEBSM). The centre was established in 1996 by SRC and the U.S. National Science Foundation as a university/industry consortium. It is focused on the development of green and sustainable technologies for IC manufacturing.

The first area of R&D for SRC and IMEC focuses on sustainable cleaning and surface preparation of new materials. This research includes integration of new channel and gate materials, such as germanium (Ge) and III/V compounds.

''This research will establish options for minimising emissions and decreasing the usage of chemicals, water and energy during processing,'' according to the R&D groups. ''Additionally, this joint initiative will explore novel in-line and real-time approaches for monitoring the efficacy of nano-structure cleaning processes.''

The second joint research project area aims to explore sustainable high-performance material planarisation processes. ''This research will advance the design and feasibility of process options that eliminate the release and discharge of nanoparticles in the manufacturing waste streams,'' according to the R&D groups.

In 1996, the University of Arizona, Massachusetts Institute of Technology, Stanford University, and the University of California-Berkeley jointly established the NSF/SRC Engineering Research Centre (ERC) for Environmentally Benign Semiconductor Manufacturing.

In 1998, Cornell University, Arizona State University and MIT Lincoln Laboratory joined the centre. In 1999 the University of Maryland became a partner. In 2006, the Centre was renamed the SRC/SEMATECH Engineering Research Centre for Environmentally Benign Semiconductor Manufacturing.

Responding to concerns over the environment and fab costs, International Sematech recently launched a new green technology centre in Austin, Texas.

-Mark LaPedus
EE Times

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