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TEL acquires GCIB supplier

Posted: 12 Jan 2007     Print Version  Bookmark and Share

Keywords:TEL  Epion  GCIB 

Semiconductor production equipment supplier Tokyo Electron (TEL) has acquired Epion Corp., a supplier of gas cluster ion beam (GCIB) technology for semiconductor applications and emerging nanotechnology markets.

"We believe that Epion's advanced process technology will truly be an asset to TEL's position in the semiconductor industry. We are eager to move forward in a collaborative effort with our customers and to integrate the benefits of Epion's unique GCIB technology," said Ken Sato, TEL president.

GCIB is a versatile atomic-scale processing technique that is suitable for production applications where surface and film quality are crucial. Key applications for GCIB include etching, smoothing, doping and physical and chemical surface modification.

"As our customers continue to aggressively shrink geometries and adopt new materials and novel device structures, we believe Epion's unique technology will find its way into several high volume production applications," said Lou Steen, VP of marketing, TEL US and appointed president of TEL Epion.

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