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Scan-field stepper targets low-cost apps

Posted: 23 Nov 2006     Print Version  Bookmark and Share

Keywords:scanfield steppers  scan-field stepper  scanfield stepper  Nikon  NSR-SF150 

The NSR-SF150 from Nikon Corp. is a scan-field, i-line stepper for high-throughput, low-cost applications. This product is the sixth generation of scan-field steppers from Nikon—with more than 300 systems operating around the world today.

The system makes use of leading-edge lens technology to achieve the same wide exposure field as DUV scanners, making it suitable for mix-and-match applications. Chipmakers can use the SF150 for sub-critical layers in mass production of next-generation memory and microprocessors.

Throughput for the new model has been increased by more than 50 per cent to 180 wafers per hour or more, while overlay was reduced by more than 30 per cent over the previous model. The new wafer exchange system with optimised load/unload positioning reduces exchange times by 60 per cent.

The SF150 incorporates new lens and stage technologies. The system incorporates the so-called Skyhook Technology to reduce vibration, plus optimised airflow and temperature control to improve lens stability and accuracy, according to Nikon.

The SF150 also incorporates the same advanced alignment system that is used on leading-edge Nikon scanners. The system delivers overlay accuracy of 25nm or less, exceeding the requirements for today's sub-critical layers.

"The new SF150 incorporates significant enhancements that boost productivity and reduce cost of ownership to an unprecedented level," stated Geoff Wild, CEO of Nikon Precision Inc., in a statement

Nikon will begin shipping systems in the second quarter of 2007.

- Mark LaPedus
EE Times

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