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Excimer laser promises better performance, longer lifespan

Posted: 28 Jul 2006     Print Version  Bookmark and Share

Keywords:Coherent  ExciStar XS  excimer laser 

The ExciStar XS from Coherent Inc. is a compact, economical excimer laser that promises exceptional performance and lifetime characteristics. The air-cooled ExciStar XS measures 649-by-300-by-400mm and delivers up to 10mJ/pulse at 193nm with an energy stability of <two per cent (1σ), at repetition rates of up to 500Hz. The use of Almeta XS all metal tube construction, corona preionization, an all solid state pulser and electrostatic dust removal yield a laser tube lifetime of 50 crore (500 million) pulses and an optics lifetime of 10 crore (100 million) pulses, the company said.

The ExciStar XS can operate at 157nm (F2), 193nm (ArF), 248nm (KrF), or 351nm (XeF). Its compact size and low total cost of ownership will make the ExciStar XS attractive to laboratory and research users, Coherent said, especially for marking applications. The ExciStar XS is RoHS compliant.

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