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Straatum updates FDC system

Posted: 10 Jul 2006     Print Version  Bookmark and Share

Keywords:Straatum  Imprint MX3  FDC  fault detection and classification 

Fault detection and classification (FDC) software developer Straatum Processware Ltd has announced the Imprint MX3, the latest version of its knowledge-based system for FDC with expanded advanced process control (APC) applications.

This system processes data from multiple advanced sensors, including broadband RF and broadband optical sensors, as if the data came from one "super" sensor. This capability heightens sensitivity to yield-impacting excursions and drift that can affect semiconductor tools.

The Imprint MX3 provides fabs and foundries with real-time FDC, improved system productivity, and predictive maintenance. It also offers the capability of transferring fault libraries across multiple tools or chambers running the same process, either at the same site or between sites.

"Increasing pressures on chipmakers to maximize equipment run time and improve wafer yields, especially during the migration to 300mm production and sub-100nm geometries, have transitioned FDC from a rapidly emerging technology to an essential capability in chip making," said Straatum CEO Brendan Coyle. "With its many upgrades, MX3 offers the industry's most scalable, reliable and efficient excursion detecting and classifying technology, and gives our customers new levels of insight into what's happening on their fab lines."

Coyle also said that Straatum is helping customers capitalize on the expanded APC capabilities of Imprint MX3.

"An increasing number of our customers recognize that Imprint MX3 offers additional cost-saving capabilities, because its advanced sensors also enable improved process control functionality in PM lifetime extension and virtual metrology," he said. "All these applications reduce the dependence on test wafers for process monitoring and improve cost of ownership."

Straatum is targeting Imprint MX3 at high-volume manufacturing of logic, DRAM and flash devices, where real-time detection and prevention of problems can result in substantial economic benefits. MX3 is expected to be available for shipping end of this month.

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