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DFM tool helps check mask failure at 65nm

Posted: 13 Jan 2006     Print Version  Bookmark and Share

Keywords:SOLID+  microlithography simulation  image verification  design-for-manufacturing  SIGMA-C Software 

SIGMA-C Software AG, a microlithography simulation company, delivered its first design-for-manufacturing (DFM) product—SOLID+, which is a patented microlithography simulation/image verification tool that enables the transfer of electronic designs unto printed wafers to help prevent mask failure at 65nm and below. This tool simulate areas up to 200x larger than previously possible with traditional lithography simulation. It identifies hot spots during the chip/cell design process at the resist level for cells larger than 20-by-20µm, letting designers know if their patterns at smaller process nodes can be produced by a photo resist.

"We introduced SOLID+ technology at DAC earlier this year, and now are pleased to provide a proven product that helps companies protect against yield loss by getting things right the first time," said SIGMA-C CEO Peter Feist. "We worked diligently during the last year with technology leaders in the industry to develop our SOLID+ product as a bulletproof way to bridge the gap between design and printed wafer results, and enable silicon accuracy."

Available immediately, SOLID+ is priced from Rs.63,14,000 ($140,000) and is also available with other SIGMA-C modules such as 3D mask and 3D wafer. The company will demonstrate the SOLID+ product at the Electronic Design and Solution Fair in Yokohama, Japan, later this month.

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