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Xerox confirms Dalsa as MEMS partner

Posted: 17 Aug 2005     Print Version  Bookmark and Share

Keywords:microelectromechanical systems  mems 

Following nine months of collaboration with Dalsa, Xerox has selected the Canadian microelectromechanical systems (MEMS) foundry as a manufacturing partner for technology development.

The relationship is set to combine Xerox's expertise in MEMS design with Dalsa's MEMS and high-voltage device manufacturing to demonstrate "new classes" of MEMS, Dalsa Corp. (Watrerloo, Ontario) said.

"We chose Dalsa because we needed a supplier who had the capability to integrate MEMS, and high-voltage CMOS, and that could do wafer level packaging," said Steven Bolte, vice-president and manager of the Xerox Wilson Center for Research and Technology in Rochester, New York, in a statement issued by Dalsa. "We have been working with Dalsa for nine months on prototype short loop experiments which will enable more rapid product time-to-market as technology matures," the statement also quoted Bolte as saying.

The companies did not disclose details of the MEMS devices they would make or the applications areas they would address.

- Peter Clarke

EE Times

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