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Luminescent gains litho win with SMIC

Posted: 07 Oct 2005     Print Version  Bookmark and Share

Keywords:smic  semiconductor  wafer  foundry 

Chinese foundry Semiconductor Manufacturing International Corp. is to evaluate Inverse Lithography Technology (ILT) products from Luminescent Technologies Inc., a provider of lithography enhancement systems for 65-nanometer and more advance manufacturing processes.

The collaboration commenced with the installation of Luminescent's Explorer development platform at SMIC's production facility in Shanghai.

ILT is a mathematical process that seeks to determine the mask features needed to produce the intended on-wafer results. The benefits of the process include: expanded lithography process windows and reduced time-to-silicon, while retaining compatibility with existing lithography infrastructure and EDA software design flow, according to Luminescent (Mountain View Calif.).

"SMIC has successfully demonstrated the enabling characteristics of this technology in its mask shop and on silicon," said I.C. Chen, vice president of the lithography technology development center at SMIC, in a statement. "Lithography represents an ongoing challenge, and the RET area, in particular, has seen few true innovations in the last decade," he added.

- Peter Clarke

EE Times

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