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Mass production technology of large size III-V compound semiconductor expitaxial wafers for microwave devices by MOVPE

Posted: 20 Jun 2002     Print Version  Bookmark and Share

Keywords:movpe wafer  microwave device wafer  phemt wafer  hbt  hetero bipolar transistor 

This application note describes the mass production techniques for large diameter MOVPE wafers for microwave devices.

View the PDF document for more information.

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