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Tronics provides MEMS manufacturing processes to foundries

Posted: 04 Mar 2015     Print Version  Bookmark and Share

Keywords:Tronics Microsystems  MEMS  foundry  CEA-Leti 

France-based Tronics Microsystems AS aims to extend its business model by offering MEMS manufacturing processes to higher volume foundry manufacturers. The MEMS foundry said it is prepared to license its Magelan and M&NEMS processes, and already develops low volume high-specification MEMS under its own name as well as offering foundry services to fabless MEMS companies.

The M&NEMS technology in particular offers the ability to integrate multiple sensor types on a single-die, added Tronics.

The Magelan process is a capacitive technology for six-axis monolithic chips, designed for miniaturised high performance accelerometers and gyroscopes. The M&NEMS technology platform, developed in collaboration with CEA-Leti, includes a piezoresistive nanowire technology combining up to ten axis sensing: accelerometers, gyros, magnetometers, pressure sensors and microphones. The inertial six-axis chip comes on a die measuring 4mm2. This is the smallest combo sensor in the industry, Tronics claimed.

Tronics has secured customers in Asia for its technologies but is not targeting high volume foundries with a view to enabling fast deployment for wearable devices, smartphones and tablet computers.

Possible licensees include TSMC, UMC, Globalfoundries and SMIC who are all offering some level of MEMS manufacturing.

- Peter Clarke
  EE Times Europe





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