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IIT-Bombay works with SRC, Applied for NAND flash

Posted: 07 Jul 2008     Print Version  Bookmark and Share

Keywords:collaborative research program  NAND flash  memory technology  portable electronic devices 

NAND flash

IIT-Bombay has recently entered into a collaborative research program with Semiconductor Research Corp. and Applied Materials, Inc. to advance NAND flash memory technology.

NAND flash is one of the most rapidly evolving technologies today, enabling a large variety of portable electronic devices from media players to navigation systems to solid-state drives for laptop computers. This international research effort is focused on providing breakthrough technology that can lead to a broad range of significantly smaller and more powerful portable electronic devices in the next five years.

"This type of collaboration, facilitated by SRC, is an efficient way to drive the commercialisation of new technologies: Industry provides near-term focus while academia brings innovation and scientific rigor," says David Kyser, senior director of strategic external research in Applied Materials' department of Advanced Technology/CTO.

An example of this important research was recently been presented by IIT Bombay and Applied Materials at the International Reliability Physics Symposium in Phoenix, AZ. As NAND flash devices continue to scale, problems with reliability and lifetime caused by cell-to-cell interference arise when conventional floating-gate (FG) memory cells are used. Charge-trap flash (CTF) is a promising replacement for FG because it exhibits negligible cell-cell interference, yet has a similar structure and manufacturing process to FG and is thus attractive for memory device manufacturers to implement using existing equipment.

The primary innovation is the development and optimisation of an engineered trap layer consisting of two nitride layers with different compositions, reinforced by a silicon oxy-nitride barrier layer. This novel structure was found to exhibit negligible cycling degradation and optimum programming characteristics, offering an alternative to approaches using more complex high-k and metal gate materials. The new structure has the potential to scale down to the sub-3xnm technology node, offering much higher storage densities than are available today.

"Materials development and process integration are the keys to implementation of the new cell designs," said Prof Souvik Mahapatra, Department of Electrical Engineering, IIT-Bombay. "The diverse, but complementary, perspectives among this team of researchers have served to more quickly uncover the physical mechanisms of endurance damage. These have provided for better understanding of reliability and consequently improved device design."





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