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Electronics giant acquires ASML's patented lithography tech

Posted: 22 Sep 2005     Print Version  Bookmark and Share

Keywords:asml holding nv  lithography technology  scattering bar technology 

Toshiba Corp. has purchased a license for ASML Holding NV (ASML)'s patented lithography technology. Toshiba will use the technology in the production of semiconductor devices.

At the heart of this licensing agreement is Scattering Bar Technology, which ASML invented as part of its exclusive Ultra k1 Portfolio. The technology increases the yield of chips per wafer through improved depth of focus, CD uniformity and other key lithography features. Additional customer benefits include enhancing the performance and value of ASML lithography tools and extending the return on investment for existing systems.

Moreover, Hitachi High-Technologies Corp., headquartered in Tokyo and serving as the exclusive sales agent for ASML in Japan, was instrumental in securing the order.





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